Image: Process Chamber Assurance tool. Designed to test
pressure sensors, mass flow controllers, pump performance, and chamber
integrity.
CAT is used primarily
for:
- Performance monitoring of process tool components to
prevent unscheduled down time and maintenance
- Fingerprinting of high yield process tools for system
matching with like tools
- Brining new and down systems online and into
specification
- Baselining tools before starting a
run
Key Features:
- A small foot print for easy maneuverability around the
fab.
- NIST traceable independent reference which may easily
be moved from one tool to another.
- Windows based easy to use graphical
software.
- Four security levels of operators allowing
administrators and engineers to design test and operators to run the test unassisted.
- IN-SITU analysis meaning that the tools are tested in
their actual running environment with all the system sensors, MFCs and electronics in
place.
- Pressure sensor noise, quality, calibration and zeroing
test
- Pump speed, speed at a given pressure and time to base
test
- Volume measurement, leak-up rate
- Mass Flow Controller linearity, gain and offset over a
defined range
- MFC setpoint performance tests mean flow, time to
control, control deviation, maximum flow, and rate of rise.
- Residual Gas Analysis
(optional)
User Friendly Features:
Windows Software
Interface;
The control software operates under Windows
95 (or Windows98). Cue cards and help screens navigate operators through the test procedures making testing a
simple operation. A great deal of flexibility allows engineers to design the full array of test or focus on one
area of concern.
Security;
The CAT software features four levels of security. Operators
may run all of the configured test. Service security level users may run tests and view configurations to assure
the CAT is working properly. Engineer level users may define the test specifications for each process tool and
components. Finally, the owner has full access to all controls including defining the security levels of the other
users.
System Status;
The status view displays the active system with the
components presently under test. Graphic representations of gas flows and valves opening provide a birds eye view
of the overall configuration. Setting up configurations for multiple process chambers is made simple by the
pre-loaded defaults and copy configuration features. Each CAT system comes pre-loaded with factory specifications
for most MFCs and manometer types. Selecting the model number automatically loads the default settings. Also, once
a process system's configuration is completed, copying the configuration for like process systems is just a couple
of mouse clicks away.
Mechanical Features;
The CAT has four swivel wheels t assure easy movement into
corners and narrow race ways. The small foot print of 20" by 24" adds to maneuverability. A utility drawer provides
a great place for storing cables, adapters and spare components. A retractable power cord and flexcoil reference
connections prevent unwanted cables dragging behind when moving from process. Stainless steel skins ensure class 1
clean room compliance.
Performance
Specifications:
Pressure
Sensor (specified for 10 Torr
Reference)
- Pressure Sensor Zero Offset to within 1
mTorr
- Pressure Sensor Slope Errors to within
+0.5%
- Pressure Sensor Linearity Deviation to within 2
mTorr
Chamber Leak Rate;
- Actual Rate of Rise to better than 1
mTorr/minute
Pumping Performance;
- Measurement of pumping speed over a user defined
range
- Defined pump-down to target within 1
second
- Base pressure to within 1 mTorr
Mass Flow Controller;
- Average Flow rate to within +0.5%
FSR
- Time to come into controlled flow to within 1
second
- RMS deviation from average flow
rate
- Graphical display of real time flow information &
analysis
- Zero offset to <+0.5% FSR
- Gain to <0.5% FSR
- Linearity to <0.5% FSR
General:
- Repeatability is better than 1% (typically 0.1%). Test
results are correctly compensated for system temperature and leak rate where applicable
- Depending on the configuration, the CAT will
characterize equipment from 1x10-4 Torr to 100 Torr
- Dimensions: which 29.25",depth 26", height
52"
To see the full product range available and individual
product data sheets, please click on the link;
Lucas Labs CAT
tool
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